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Thin Film Thickness Measurement Instrument
Thin Film Thickness Measurement Instrument
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Thin Film Thickness Measurement Instrument
Product Code: ATGX310
application
Description：
Incident lights with wavelengths range between 200-1700nm vertically shine on the surface of thin film, when transmittance of thin film happen, ATGX310 can utilize lights reflected via upper and lower boundaries of thin film to create an interference pattern superimposed, the spacing of the pattern’s sinusoidal waves, when combined with the refractive index of the material, can be used to calculate the thickness of the materials.
What is the structure of Thin Film Measurement System?
Thin Film Measurement System compose of Fiber Optic Spectrometer（ATP3010P）,R3 Measurement holder( R3）,Deuterium Halogen Light Sources（ATG1020）, Fiber collimator（FIBH-2-UV）, and UV fiber（FIB-600-UV
What is the principle of Thin Film Measurement System?
Maximum measuring range between 10nm~250um, even complete 3-layers thin film thickness measured. Inside, the core elements include ATP3010P high-resolution, super-sensitivity spectrometer, 4096 pixels CCD array. Spectra readout in our software reveal oscillations caused by optical interference within the layers of the thin film substances. The advanced algorithm provides reliable accurate results measured.Connect to USB port in PC, it's not required to waste time to preheat light source, or correct baseline, our built-in spectrometer accurate correctness means zero maintenance, unique dark chamber structure can measure accurate results in lightless condition. Light source life span 4000hrs.
Specifications:
1. Optical system:
Deuterium Halogen light source
Collimating mirror
Receiver：Optic fiber spectrometer
Wavelength：200-1100
Range measured：0-100%
Technical parameters:
Wavelength accuracy ±0.5nm
Wavelength repeat ≤0.2nm
Spectral bandwidth: 1nm
Stay light ≤0.05%
Transmittance accuracy ±0.5%
Transmittance repeat ≤0.5%
Datasheet of Thin Film Measurement System:
ATGX310 specification | ||||
Item | ATGX310-VIS | ATGX310-XR | ATGX310-DUV | ATGX310-NIR |
Wavelength range | 400-850nm | 250-1060nm | 190-1100nm | 900-1700nm |
Thick range | 50nm-20um | 10nm-100um | 1nm-100um | 100nm-250um |
Thick resolution | 0.1nm | 0.1nm | 0.1nm | 0.1nm |
repeatability | 0.3nm | 0.3nm | 0.3nm | 1.0nm |
Incident angle | 90℃ | |||
Up to10 layers | ||||
Sample materials | Transparent/semi-transparent | |||
Modes Measured | Reflectance & Transmittance | |||
Rough film thickness measured | Yes | |||
Speed measured | ||||
Online | Y | Y | Y | Y |
Light spot size | Standard: 200um or 400um | |||
Customized: 100um | ||||
Microscope configured | Y | |||
CCD imaging | Y | |||
Scan options | 150mmX300mm | 150mmX300mm | 150mmX300mm | 150mmX300mm |
Xy scan platform | ||||
Vacuum | Y | |||
Applications:
Optical thin film thickness measurement system can be applied to sectors of Semi-conductor, LCD, TFT, PDP, LED, Touch-screen, vehicle lamp, medical, solar energy, polymer, glass etc.
Glasses, Sun-glasses, sunblock protective film
Various optical element, filters etc.
Plane glass, plastic product
Mobile phone display, LCD
Other transparent or semi-transparent materials
