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Surface Thickness Tester
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Surface Thickness Tester
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Product Code: SM200
application
SM200 is an automatic thin film thickness mapper developed by utilizing the principle of thin film reflected light interference. It uses the light with the widest wavelength range of 200-1700nm to vertically incident on the surface of the thin film. As long as the thin film has a certain degree of transmission, the SM200 can calculate the thickness of the film according to the reflected interference spectrum, as well as other optical constants such as reflectivity. , refractive index and extinction coefficient, etc., the thickness of the maximum mapping range can reach 1nm ~ 250um.
The SM200 automatic optical thin film thickness mapper is constructed by the surveying and mapping host, the surveying and mapping platform, the Y-type optical fiber and the host computer software. The leading generation of automated optical film thickness gauges.
Wide film thickness range（1nm ~ 250um）
Wide wavelength range （200-1700nm）
Non-contact,non-destructive testing system;
Ultra-long life light source, higher luminous efficiency
Compact and affordable without compromising high precision
High-resolution,high-sensitivitysspectrometer,the measurement results are more accurate and reliable
The software interface is intuitive, and the operation is convenient and time-saving
Historical data storage to help users better grasp the results
Optical constant analysis (n: Refractive index, k: Extinction coefficient) with Non-linear Least-Squares Method
Analytical algorisms are Peak-Valley Method, Fast Fourier Transformation (FFT) Method, Non-linear Least-Squares Method and Optimization Method
Virtually all smooth, translucent or low absorption coefficient films an be mapped, which includes almost all dielectric and semiconductor materials, including silicon dioxide, nitriding layer, diamond-like carbon, polycrystalline silicon, photoresist, macromolecue, polyimide, amorphous silicon, etc.
- Semiconductor coating: photoresist, oxide, desalination layer, silicon-on-insulator, wafer back grinding;
- Liquid crystal display: gap thickness, polyimide, ITO transparent conductive film;
- Optical coating: hard coating, anti-reflection layer;
- Microelectronic system: photoresist, silicon film, printed circuit board;
- Biomedical: medical equipment, Parylene
SM200 Optical Film Thickness Gauge | ||||
Model | SM200-LUV | SM200-HUV | SM200 | SM200-NIR |
General specifications | ||||
Spectral range | 200nm-1000nm | 200nm-1000nm | 400nm-1000nm | 900nm-1700nm |
Light source | Deuterium halogen Lamp | Tungsten halogen lamp | ||
Measurement specifications | ||||
Thickness range1 | 1nm-10um | 1nm~30um | 20nm-60um | 100nm-250um |
Accuracy2 | ±2nm或0.2% | ±3nm或0.4% | ||
Incidence angle | 90° | |||
Film thickness layers | 1~3 | |||
Sample material | Transparent or translucent film | |||
Measurement mode | Single-point/multi-point/automated measurements | |||
Spot size3 | 2mm | |||
Sample size | Diameters from 1mm to 300mm or larger | |||
Basic requirements | ||||
Operating system | Windows10/11 | |||
Indicator light | Deuterium lamp indication, halogen lamp indication | Halogen lamp indication | ||
Button | Power buttons, deuterium lamps, halogen lamps | Power button, halogen power | ||
External interface | Power outlet, USB 2.0, RJ45 | |||
Scanning platform | Rotate + X axis movement | |||
Movable stroke | 150mm*360° | |||
Material | Aluminum alloy | |||
Power supply | 100~240VAC，50~60Hz | |||
Packing list | Mainframe, measuring platform, power cord, communication cable, optical probe, Y-fiber | |||
Remarks: 1. Depends on the material; 2. The larger one is the larger and depends on the material; 3. Optional up to 20um; | ||||
