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film thickness tester
Product Code: SM230
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application

SM230 is an automatic thin film thickness mapper developed by utilizing the principle of thin film reflected light interference. It uses the light with the widest wavelength range of 200-1700nm to vertically incident on the surface of the thin film. As long as the film has a certain degree of transmission, the SM230 can calculate the thickness of the thin film according to the reflected interference spectrum, as well as other optical constants such as reflectivity, refractive index and extinction coefficient, etc., the thickness of the maximum mapping range can reach 5nm ~ 250um.
The SM230 automatic optical thin film thickness mapping instrument is constructed by the surveying and mapping host, the surveying and mapping platform, the Y-type optical fiber and the host computer software. technology, providing users with a new generation of leading automatic optical film thickness mappers.

          

  • Non-contact, non-destructive testing system;
  • Ultra-long life light source, higher luminous efficiency;
  • High-resolution, high-sensitivity spectrometer, more accurate and reliable mapping results;
  • The software interface is intuitive, and the operation is convenient and time-saving;
  • The surveying and mapping speed is fast, and it supports multi-point surveying and mapping point map drawing;
  • Support drawing 2D/3D thickness distribution map of samples;
  • High-precision, long-life 3-axis rotary platform;
  • Historical data storage to help users better grasp the results;
  • Desktop distribution design, suitable for rich scenarios;
  • Low maintenance cost and convenient maintenance;
  • Biomedical: medical equipment, Parylene
  • Optical coating: hard coating, anti-reflection layer;
  • Semiconductor coating: photoresist, oxide, desalination layer, silicon-on-insulator, wafer back grinding;
  • Microelectronic system: photoresist, silicon film, printed circuit board;
  • Liquid crystal display: gap thickness, polyimide, ITO transparent conductive film;

SM230 Automatic Optical Film Thickness Mapper



Model

SM230-LUV

SM230-HUV

SM230

SM230-NIR

General specifications

Spectral range

200nm-1000nm

200nm-1000nm

400nm-1000nm

900nm-1700nm

Light source

Deuterium halogen Lamp

Tungsten halogen lamp

Measurement specifications

Thickness range1

5nm-10um

5nm~30um

20nm-60um

100nm-250um

Accuracy2

±2nm0.2%

±3nm0.4%

Incidence angle

90°

Film thickness layers

1~3

Sample material

Transparent or translucent film

Measurement mode

Single-point/multi-point/automated measurements

Spot size3

2mm

Sample size

Diameters from 1mm to 300mm or larger

Basic requirements

Operating system

Windows10/11

Indicator light

Deuterium lamp indication, halogen lamp indication

Halogen lamp indication

Button

Power buttons, deuterium lamps, halogen lamps

Power button, halogen power

External interface

Power outlet, USB 2.0, RJ45

Scanning platform

Rotate + X axis movement

Movable stroke

150mm*360°

Material

Aluminum alloy

Power supply

100~240VAC50~60Hz

Packing list

Mainframe, measuring platform, power cord, communication cable, optical probe, Y-fiber

Remarks:

1. Depends on the material;

2. The larger one is the larger and depends on the material;

3. Optional up to 20um;

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