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Confocal imaging
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Product Code: ATM8600
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application
ATM8600 3D Laser Scanning Microscope is self-designed to perform non-contact profile, roughness, and film thickness measurements
with nanometre-level resolution on any material or shape. It’s principle of confocal technology, combined multiple holes disk for parallel scanning technology, high precision z-direction scanning module, and 3D modelling algorithm can scan on the
object surface non-contact profile and 3D images, the software process 3D images to process and analyze data, result in ATM8600 used for 2D, 3D optical measuring instrument.

Confocal microscope is used to measure various from smooth to rough , from low to high reflectivity object surface, from nano-level to micron-level parts roughness, flatness, geometric profile microscopy, curvature etc. Measure result can be fully compliant with ISO, ASME, EUR, GBT
international standards.
atm8600
Principle Confocal Microscopy Optics System
Objectives 5 holes electric
FOV range 160×160 μm~1.6×1.6 mm
Scan rate ≥10HZ In the temperature 20±2℃, 20x objectives, measure 4.7µm golden tile sample
Height Repeatability 20×:40nm / 50×:20nm / 100×:20nm In the temperature 20±2℃ measure 4.7µm golden tile sample
Height Accuracy ± (0.2+L/100) μm
Height Display resolution 0.5nm
Width Repeatability 20×:100nm;50×:50nm;100×:30nm In the temperature 20±2℃ measure 4.7µm golden scale line sample
Width Accuracy ± 2%
Width Display resolution 1nm
XY stage size 210×210 mm
XY stage Move range 100×100 mm
XY stage loading 10Kg
XY stage Control mode Electric
Z-direction range 100 mm
Illumination Light source LED
Illumination Max. output 840mW
Working condition Temp: 10℃~35℃,temperature gradient < 1℃/15 minutes, Humidity: 30~80%, vibration<0.002g
ftir spectrometer
Dimensions 590×390×540mm
Weight 45Kg
Electrical parameter
Power supply AC220V/50Hz
  • Super fun of 3D measuring on the confocal microscope
  • Precision fabrication: 3D profile, angle of high precision stylus tip
  • Glass panel: 3D profile, profile size of light guide plateLGP
  • Optical communication: 3D profile, Radius of curvature of microlens
  • Photovoltaic: 3D profile, tile height &width of grid-lines solar system
  • High precision angular sample
  • Semi-conductor manufacturing and encapsulation processing
  • Glass panel display and high precision component of electronic products
  • Optics manufacturing, micron-sized nano-materials manufacturing
  • Car parts manufacturing
  • Microelectromechanical systems (MEMS) component manufacturing
  • High precision fabrication sectors
  • Aerospace, defense and military
  • Scientific research

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